摘要：SEM和AFM技术是最常用的表面分析方法。本文介绍了SEM和AFM 两种技术的原理，描述了这两种技术在样品形貌结构、成分分析和实验环境等方面的性能，比较了两种技术的特性和不足，充分利用两种技术的互补性，将两种技术结合使用，有助于更加深刻地认识样品的特性。
关键词：原子力显微镜；扫描电子显微镜；表面形貌；化学成分

Abstract：Scanning electron microscopy(SEM)and atomic force microscopy(AFM)are powerful tools for surface investigations． This article described the principles of these two techniques， compared and contrasted these two techniques with respect to the surface structure and composition of materials，and environment．SEM and AFM are complementary techniques，by having both techniques in an analytical facility，surface investigations will be provided a more complete representation．
Key words：atomic force microscopy；scanning electron microscopy；surface structure；composition